Electron Beam Testing Technology (Microdevices)
Electron Beam Testing Technology (Microdevices)
Editorial Reviews
Book Description
This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the technology.
Book Info
Primarily intended to be a reference work that draws together in a coherent text both background material and recent developments from numerous publications on, or related to, the subject area. DLC: Semiconductors-Testing.
Electron Beam Testing Technology (Microdevices),John T.L. Thong,Springer,0306443600,Electron beams,Electronics - Circuits - General,Engineering - Electrical & Electronic,Industrial applications,Physics,Scanning electron microscopes,Science,Science/Mathematics,Semiconductors,Technology & Industrial Arts,Testing,Science / Physics
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